#high-na

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Metal optical components with lenses mounted on stands arranged on a table while two people in protective suits work in a cleanroom laboratory

How EUV Lithography Works, in Plain Terms

EUV uses 13.5nm light to print the smallest features on modern chips. The way that light is made, lost, and steered off precision mirrors is one of the strangest feats in manufacturing, and by 2026 it is what makes 2nm-class chips possible.

Ahmad J · Jul 30, 2026 · 8 min read